|
Amerimade's family of high temperature Quartz Baths are designed for etching, cleaning, and stripping. They are commonly used for resist strip, silicon nitride etch, RCA clean, etc. Our baths are manufactured with a high temperature sealant filled labyrinth to prevent liquid intrusion to the heater and the flange is sloped to divert run-off away from the seal.
Standard features include: -
+/- 1ºC temperature control when used with our microprocessor controller. -
Operating temperature range of 30ºC to 200ºC.
-
Available in sizes compatible with 4", 5", 6" or 8" wafers in one or two carriers.
-
Constructed as a one piece seamless process vessel.
-
Redundant built in over temperature cut-out. -
Teflon protected power cord with flexible outer conduit.
Amerimade also offers several options to customize quartz baths to users' specifications. These options include magnetic stirrer, drain system, N2 agitator, cover, liquid level sensor, condensing head, and H2O2 injection
Exceeding Industry Expectations
Call 1-800-WET-ETCH
New Surplus Wet
Stations Available
Visit Amerimade @ Trade Shows
Near You!
|