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Automated 450mm Single Wafer Wet Processing System

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MODEL: Eagle-SWP-450A
 
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Eagle™ SWP-450A – Automated Wet System

 The EagleTM SWP-450A system is a scaled version of our mature 300mm product line developed and delivered to the mainstream microprocessor segment on a global basis. It offers the user the ability to massively customize the system for their specific process development requirements in a robust, well-tested platform.

  
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Eagle Eagle-SWP-450A Automated Wet System

While semiconductor manufacturers and equipment suppliers continue their debate over the potential benefits, costs and risks of transitioning from 300mm to 450mm wafers, industry leaders are moving forward with early research and development efforts. Expensive lessons leanred during 150 to 200, and 200 to 300mm conversions have not been forgotten by the industry. Investment will be careful and methodical, driven by the ongoing need to justify eventual large scale investment by demonstrating tangible commercial advantages.

 
While 450mm is being considered as the next phase of productivity gains, substantive technical concerns exist, including ingot manufacturing issues (mass and cooling time), gravitational bending of the substrate, vibrational effects and flatness. Without acceptable solutions to these issues, it will be difficult, if not impossible, to predict the efficacy of a 450mm transition. Continuing downward pressure on cap ex and manufacturing costs by the market will require, now more than ever, that IDMs move to pilot line and production of 450mm ONLY when commercial success is assured.
 
In order to support this critical, early R&D effort, Amerimade has extended our automated single wafer wet process capability to 450mm. The EagleTM SWP-450A system is a scaled version of our mature 300mm product line developed and delivered to the mainstream microprocessor segment on a global basis. It offers the user the ability to massively customize the system for their specific process development requirements in a robust, well tested platform. Significant system features include:
 
Ø Vertical wafer processing with ergonomic load/unload ports
Ø Application specific wafer fixtures for full, front side, back side or edge exclusion zone processing; system compatible with all fixture types without reconfiguration
Ø Extremely broad processing bath options
Ø Robust, mature X-Z automation system with or without multi-tasking capability
Ø Variable, programmable sequential process flows
Ø Optional automated wafer fixture storage buffer
Ø PC/PLC control system with color graphical user interface and data logging
Ø Modular design allows the integration of acid/base compatible plastic modules with solvent compatible stainless steel modules allowing a single system to serve as an entire wet process lab
Ø Fully enclosed cabinet compatible with Class 1 environments, and available with optional integrated HEPA system.
Ø Space efficient footprint (72” deep x 95” high x variable width)
Ø FM-4910 compatible cabinets and engineered CO2 fire suppression systems
Ø Modular chemical blending and delivery systems
Ø Modular waste recovery and storage systems
 
The EagleTM SWP-450A system supports processes including:
 
Ø FEOL/BEOL clean
o    FEOL surface prep
o    Backside cleans
o    Post deposition (metal, nitride, poly, oxide)
o    Post CMP
o    Organics removal
Ø FEOL/BEOL post etch/ash clean
o    Post STI etch
o    Dielectric trench
o    Gate stack clean
o    Al and Cu interconnects
Ø Oxide and metal etch
Ø Resist strip
Ø Nitride strip
Ø Electroplating
Ø Electro-etching
Ø Quality control sequential film etch back
 
The EagleTM SWP-450A system is available with a rich variety of process chambers including:
 
Ø Static (ambient or temperature controlled)
Ø Recirculated (close-couple or remote pump/filter units)
Ø Ultrasonic and megasonic enhanced
Ø Conventional electroplating/electro-etching baths
Ø Paddle and/or magnetically enhanced electroplating baths
Ø Rinse baths
o    Quick dump rinse with integral spray & cascade (with/without dual dump doors)
o    Spray
o    Cascade
Ø Bath material options include:
o    Natural polypropylene
o    PVDF
o    PFA Teflon
o    316L Electropolished stainless steel
o    Quartz
 
The EagleTM SWP-450A system can be fitted with various chemical and temperature control devices:
 
Ø Immersion heater exchanger coils with external heater/chiller
Ø Teflon-coated immersion heaters
Ø Externally bonded heaters
Ø In-line Teflon or quartz heaters
Ø Hot DI water systems
Ø Chemical blending systems
Ø Bath spiking systems
Ø Ozonation systems
Ø Nanogreen CCS-1000 Critical Cleaning System
 
The EagleTM SWP-450A system offers a variety of final drying technologies including:
Ø IPA vapor dry
Ø Heater nitrogen
Ø Nitrogen air-knife
 

No matter what wet process development objectives you have for your 450mm development, the Amerimade EagleTM SWP-450A system offers you the versatility, flexibility and performance you seek during this early transitional stage.

Brochure Semi-Auto Wet System

Semi Auto Wet System
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FAQ


Equipment:

Will Amerimade build a custom system for me? 

Yes, Amerimade has a full staff of design engineers to review your specific requirements. Amerimade will typically start with one of many proven standard platforms to design a custom system.

 

Does Amerimade have experience in building plating equipment? 

Yes, we have manufactured hundreds of systems, many have very complex processes for plating wafers and other substrates, we offer manual operation and full data logging in real time systems, communication with DC power supplies, monitoring / controlling process bath chemistry and many other system features.

 

What construction material is best for my system? 

Amerimade Technology's sales and engineering staff are knowledgeable in regards to material compatibility, FMGlobal 4910 approved materials and local guidelines.

 

Does Amerimade provide SECS-II/GEM - Network Communication

Yes, our software group is very knowledgeable with many types of communication devices and software, including SECS-II/GEM, Promise, WIP...


 Design Capabilities:

Can Amerimade design fixtures or racks to hold my product / substrate or medical device

Yes, we will review your needs and propose a solution. Our engineering team is very knowledgeable with the design, features and construction of many product fixtures and racks, i.e. custom size holders, fixture with wafer sealing (backside/frontside), making electrical contact with your part and software control to verify contact has been made.

 

Can Amerimade build prototype parts?

In most cases Amerimade can produce prototypes using our state of the art automated prototype machine. A drawing would be created and than downloaded to the prototype unit to start the run / build.

 

What if I have a unusual part or substrate to process? 

We can review your part/substrate and propose a solution, Our systems can handle substrates beyond 400mm.

 

How about SEMI S2, CE or 3rd. party electrical inspections? 

Yes, Amerimade uses SEMI S2, NFPA, NEC, as guidelines when manufacturing equipment. Amerimade can provide a quotation for any inspection reports you may require. Amerimade Technology guarantees our systems will pass a 3rd. party electrical inspection.


 Service and Support:

How about service and support after the sales? 

Yes, Amerimade warranties its whole line of products, we have a field support team which is available 24/7 by calling our toll free number: 1-800-938-3824 (1-800-WET-ETCH) or visit our dedicated service division at UptimeService.com; this support would depend on your specific contract with Amerimade Technology.

 

Will Amerimade do start-up and training of my new equipment? 

Yes, Amerimade technicians may be on site to assist the customer in making sure items are connected properly. After the install is completed (by customer) Amerimade support may do first run (start up) of the system and employee training. This support would depend on your specific contract with Amerimade Technology.

 

Would Amerimade install the equipment i.e. Wet Stations at our facility? 

Amerimade normally does not install new systems, this would be the reasonability of the customer or their contractors, however Amerimade technicians may be on site to assist in making sure items are connected properly. After the install is completed Amerimade support may do first run (start up) of the system and employee training, this support would depend on your specific contract with Amerimade Technology.

 

Does Amerimade have the capability to upgrade my existing system? 

Yes, we have field technicians and engineers specializing in these areas. Please visit our dedicated service division at UptimeService.com

 

Can Amerimade supply parts and / or service on other brand equipment? 

Amerimade stocks a variety of parts and components for use on other brands. i.e. UltraFab, BPS...


 Sales:

Would it be possible for our company to visit Amerimade? 

Yes, Amerimade welcomes visitors, we can provide a plant tour complete with working demo equipment.

 

Will Amerimade visit my facility? 

Upon request Amerimade sales / engineers would be happy to visit and review your current and future requirements.

 

Can I get a firm detailed quotation with layout drawings? 

Yes, once you have provided your request to our sales department, we will provide a detailed quote, lead time, terms and overview drawings of your request.

 

Can I get a quick budgetary quotation for a new wet bench? 

Yes, visit our 3 step online Create-A-Bench, its fast and easy, or you can call one of our sales engineers @ 1-800-938-3824 (1-800-WET-ETCH).

 

Does Amerimade offer discounts on multi-system orders? 

Yes, our customers would benefit from placing multiple orders at the same time, please call our sales dept. for more information. 1-800-938-3824

 

Can I use a credit card to make purchases? 

Yes, we accept most major credit cards, i.e. AMEX - Master Card  - Visa.

 

Do you have any pre-owned equipment available? 

Yes, visit our online SurplusWetStations.com, or you can call our sales department @ 1-800-938-3824 (1-800-WET-ETCH).


 Documentation:

What happens after my order is placed, is a timeline provided? 

Yes, Amerimade will provide a timeline, hold a review meeting with the customer and create detailed sign-off drawings.

 

Does Amerimade provide operation manuals? 

Yes, Amerimade will provide a complete operation (software) and maintenance manuals with detailed schematics of the equipment wiring, plumbing and facility requirements.

 

What type (format) of documents and drawings can I expect to receive? 

Amerimade creates drawings for most projects using Solidworks - AutoCAD Inventor (3D) and standard CAD drawings, other document formats, i.e. Acrobat PDF, Pictures in JPG, MSWord, MSProject. Amerimade will convert any documents to a standard readable format for our customers.

 

What happens if I need extra equipment documents for city government or the local fire department? 

Yes, Amerimade will provide additional product information and drawings if available.


About Amerimade:

How long has Amerimade been manufacturing equipment, i.e. wet process systems | plating systems | chemical dispense

Since 1992 (over 16 years), with hundreds of reliable systems in service.

 

D&B report, is Amerimade financial sound? 

Amerimade has been in business since 1992, with excellent record keeping and D&B report. Documentation can be provided.

 

How many engineers does Amerimade have? 

We have over 16 qualified engineers to design and assist customers from start to finish. 

 

Does Amerimade have individual departments to respond to my needs? 

Yes, we are well organized with many departments to respond to your needs, i.e. engineering, technical, automation, design group, parts / service, sales engineers and administrative. 

 

Is Amerimade's manufacturing facility automated? 

Yes, Amerimade has several automated CNC routers, 2 automated CNC milling machines, automated bender, automated prototype system and many other machines to assure our customers receive a precision robust system.

 

Welcome to Amerimade Technology Inc.

SUPERIOR PERFORMANCE

LOW COST OF OWNERSHIP

KNOWLEDGEABLE STAFF

TOP SERVICE & SUPPORT

DESIGNED FOR SAFETY

EASE OF USE OPERATOR CONTROLS


Our Products Includes:

Supported PV Applications: 

  • Polysilicon filament prep

  • Chunk / slab polysilicon reprocessing prep

  • Crushed / pelletized polysilicon metal mitigation

  • Saw damage etching

  • Wafer texturing

  • Wafer cleaning

  • Oxide etching stripping

  • Pattern develop

  • Silicon feature etch (acidic or caustic)

  • Resist strip

 

 

For the photovoltaic / solar industry, we provide a full range of products which serve the great breadth of current research & development and production requirements. This includes versatile manual wet stations for early development of break-through silicon, CIS-thin-film, Silicon/GaAs technologies and Nanotechnology, as well as wet benches fully automated large batch processing systems for mainstream production applications. Thus, customers have the ability to enter production with the same processing technology as they developed their products on.

Many of our innovative customer solutions for wet benches include unique fixtures required to handle substrates that are of uncommon size, shape, rigidity, weight, and/or material, or which must be compatible with physical changes that occur during the wet process. Substrates which we have designed unique solutions for include: elements of up to 3,000mm in length, lenses of 1,200 pounds in weight, crushed material of 1mm grain size and flexible metal panels of <0.007” thickness.

Amerimade also Manufactures wet processing for Medical Device Equipment for Polishing Stents, Catheters, Micro Parts.  key: medical device equipment, Medical Devices needing polishing for stent, drug coated stents and micro machining wet benches, stripping and etching, cleaning with ultrasonic. Visit our product page to review all our wafer process systems and accessories.

-- Amerimade Wet Benches -- Amerimade Wet Bench -- Amerimade Used Wet Benches

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