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Manual Operated Wet Processing System

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MODEL: Eagle-SWP-MAN
 
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Eagle™ M - Manual Wet Station
Exhausted work station for applications where fume and liquid control is required. System is specifically intended to support full wet chemical processing though its design features, and by using only construction materials that are compatible with strong acids, bases and solvents, as appropriate. System can be configured to provide virtually all types of chemical processing and rinse process baths, including various plastics, stainless steel and quartz, static or recirculated, ambient or temperature-controlled, open, covered or reflux, and with the additional options of ultrasonic or megasonic energy, as well as electrostatic potential for plating, etching or polishing, and with agitation capability. Additional options include dry chambers, glove washes, recirculators / chillers / heat exchanger, concentration monitors, hot plate and stirring systems, electrical outlets and perforated work areas. System control options include modular, microprocessor-based controllers, PLC controller with touch screen graphical user interface, PC/PLC controller with color touchscreen and full PC-based recipe and data management capability. These stations are available in standard even widths of 2, 4, 6 and 8 feet with longer, modularized and odd width units available upon special order. 
  
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Manual Bench Tech Data

All specifications subject to change without prior notice.

 
Standard Design Includes:
·         Front Access or Rear Access manual work station with exhausted work area for wet chemical processing
·         Work area dimensions:
o   Depth (front of tool to back of work area): 38 inches
o   Width: 2, 4, 6 or 8 feet (standard)
o   Height:
§ Overall (floor to top of system): 72 inches (plus 8 inches for exhaust duct transition)
§ Deck top (floor to deck top work area): 37 inches
·         Material of Construction: 
o   Identical material for station hull, decktops and process bath supports
·         Wet exhaust plenum
o   Exhausted full plenum under all baths and QDRs with lip exhaust around each process chemical bath plenum
o   Plenum provides full secondary liquid containment under the entire work deck
o   Containment volume is >110% of the aggregate volume of all process baths
o   Floor construction slopes to drain locations to aid drain speed and rinsing/purging, and includes folded, seamless lower joint to help prevent plenum leakage over the life of the system; welded and sealed side joints
o   Includes 2”Ø main waste drain threaded bung with plenum-side strainer
o   Leak-checked prior to factory acceptance and shipment
o   Station exhaust is terminated in round duct to ease connection to facility exhaust system


·         Vapor exhausted work area
o   Reinforced transparent side and eye shields
o   System is engineered to achieve 100 to 150 linear feet per minute of face exhaust velocity when specific volumetric exhaust flow is provided by facility to protect operator and system components from harmful vapors
o   Exhaust flows via:
§ Slotted rear wall exhaust
§ Lip exhaust (into plenum) for each chemical process bath
·         Deck tops and adjustable deck rail system
o   Easily removable deck top for maintenance and serviceability; perforated deck top available as option
o    All process baths are supported by a robust, re-configurable, adjustable rail system which supports field reconfiguration
·         Head case components
o   Head case door hinges manufactured of compatible material (all plastic or all stainless steel)
o   Head case door safety struts
o   Head case latches with secondary lock which requires use of hand tool to open (customer can elect not to use this feature)
o   Emergency Power Off (mushroom switch)
o   Power on/off switches
o   Deck and head case lighting
o   Minihelic exhaust gauge
o   Power distribution, electrical safety and control system components
o   Nitrogen purge
·         Plumbing:
o   Standard polypropylene valves
o   Fittings compatible with specified chemistries
·         System transport and mounting/bracing
o   Heavy-duty casters to support tool transport within customer facility
o   Adjustable leg levelers for final system leveling
o   Seismic bracing via use of leveler legs or vertical cabinet side walls
·         Main electrical disconnect box to be installed at customer site (ships loose)
·         Support
o   24 hour technical Hot Line service
o   Detailed wiring schematic and manuals on CD
 
Automatic Upgrades if One or More Process baths are Specified
·         Polypropylene DI water manifold; includes recirculation loop and tees for future modifications
·         Polypropylene valves and connectors
o   Material upgrades available: PVDF, PFA (Teflon®), Stainless Steel
·         Standard polyethylene wetted tubing upgraded to PFA (Teflon®) when bath is other than polypropylene
·         CDA and N2 facility connections located on backplane of station
·         Nitrogen head case purging with flow adjuster
·         Full electrical panel in head case to support process bath functionality
 


Hull Materials Available:
·         T-304 stainless steel
·         T-316L stainless steel
·         White Polypropylene
·         FM Approved CP7D or PVCC
 
Available Options:
·         Process and rinse baths:
o   Natural polypropylene, PVDF, PFA Teflon®, quartz, stainless steel
o   Static, recirculated (2 or 4 sided weir; straight or sawtooth weir)
o   Open, covered, reflux (condensing)
o   Ambient or temperature controlled
o   Ultrasonic, megasonic
o   Electrolytic processing (electroplate, electropolish, electroetch)
§ Custom anode and cathode fixtures for customer substrates
o   Contact verification
o   Backside protection
§ Paddle plating cells
§ Custom shields and spargers
§ Carbon filtration
§ Power supplies
§ Pre-wet cells
o   Concentration controlled; spiked
o   Rinse baths:
§ Cascade
§ QDR with cascade and spray rinse capability
o   Mechanical agitation
o   Nitrogen bubblers
o   City-water aspirators
o   Pneumatically-actuated bath drain valves
o   Bath and QDR lids (automatic)
o   Remote pump and filter configurations
o   High temperature fluid delivery systems
o   Concentration monitor and control systems
o   pH monitor systems
o   Resistivity monitor options (single and dual probe)
o   Reservoirs
§ Process chemistry
§ Pre-heat
§ Cool-down
·         Sinks
·         Glove wash
·         Deck-mounted Spin Rinser Dryer
·         Heated CDA or nitrogen dry chamber
·         Alarmed plenum float sensor for liquid leak detection


·         Teflon® DI water non-recirculating gun (Recirculating option)
o   Qty 1 for 2, 4 and 6 foot wide stations
o   Qty 2 for 8 foot wide station (and longer custom benches)
·         Teflon® nitrogen gun
o   Qty 1 for 2, 4 and 6 foot wide stations
o   Qty 2 for 8 foot wide station (and longer custom benches)
·         Photohelic exhaust monitor with or without alarm instead of Minihelic exhaust gauge
·         Ball valve on main drain
·         Dedicated drains for process baths
·         Bulk chemical delivery system for safe and efficient storage and transport of bulk chemistry from barrels to process baths; optional mixing and blending capability
·         Carboy(s) and bulk chemical waste recovery systems for applications where facility drains are unavailable, or where specific chemistries need to be segregated from normal effluent flows
·         Yellow lens covers for photo-safe light requirements
·         Perforated deck tops for direct drain of fluids into wet plenum
·         Plenum wash
·         System control options:
o   Modular, microprocessor-based process bath controls (mounted in head case face)
§ Pushbutton controls for process bath and component controls
o   PLC control system with touch screen graphical user interface
o   PC over PLC Control system & HMI:
§ Touch screen graphical user interface with articulated
§ Chemically resistant keyboard and mouse (optional)
§ Full recipe-writing and storage capability
§ Data logging and historical and real-time data charting
§ Log process variables (time, temperature, concentration, etc.
§ Log process data based on date and time
§ Log process recipe name and lot ID (if input)
§ Log alarms and events
§ Integrated UPS back-up to maintain control of system in the event of power failure, and until power is restored to the system (approximately 15 minute duration limitation)
§ Multi-level user password protection
§ Out-of-tolerance condition alarms
§ Network & Ethernet compatibility (Optional)
§ SECSII/GEM (Optional)
§ Barcode Reader (Optional)


·         Upgrade DI water manifold to PVDF
·         Receptacle (Standard, Explosion Proof, GFI available)
·         Fire suppression systems:
o   CO2
o   Water flood (integrated, self-actuating sprinkler heads)
·         External DI water heater for heated rinse capability
·         External temperature circulator (heater/chiller) to control bath temperatures
o   Circulator stands
·         External ozone system for ozonated water processing
·         Third-party certifications (Electrical safety, ergonomics, seismic, CE)
·         Integration of customer-supplied equipment
 
Common Applications:
·         Production facilities
·         Research & Development laboratories
·         Educational institution labs
·         Processes:
o   Etch
o   Strip
o   Clean
o   Electro-plate
o   Electro-polish
o   Electro-etch
o   Batch develop
o   Texture
o   Saw damage removal
o   Rinse


Manual wet bench Brochure

Manual Wet System
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FAQ


Equipment:

Will Amerimade build a custom system for me? 

Yes, Amerimade has a full staff of design engineers to review your specific requirements. Amerimade will typically start with one of many proven standard platforms to design a custom system.

 

Does Amerimade have experience in building plating equipment? 

Yes, we have manufactured hundreds of systems, many have very complex processes for plating wafers and other substrates, we offer manual operation and full data logging in real time systems, communication with DC power supplies, monitoring / controlling process bath chemistry and many other system features.

 

What construction material is best for my system? 

Amerimade Technology's sales and engineering staff are knowledgeable in regards to material compatibility, FMGlobal 4910 approved materials and local guidelines.

 

Does Amerimade provide SECS-II/GEM - Network Communication

Yes, our software group is very knowledgeable with many types of communication devices and software, including SECS-II/GEM, Promise, WIP...


 Design Capabilities:

Can Amerimade design fixtures or racks to hold my product / substrate or medical device

Yes, we will review your needs and propose a solution. Our engineering team is very knowledgeable with the design, features and construction of many product fixtures and racks, i.e. custom size holders, fixture with wafer sealing (backside/frontside), making electrical contact with your part and software control to verify contact has been made.

 

Can Amerimade build prototype parts?

In most cases Amerimade can produce prototypes using our state of the art automated prototype machine. A drawing would be created and than downloaded to the prototype unit to start the run / build.

 

What if I have a unusual part or substrate to process? 

We can review your part/substrate and propose a solution, Our systems can handle substrates beyond 400mm.

 

How about SEMI S2, CE or 3rd. party electrical inspections? 

Yes, Amerimade uses SEMI S2, NFPA, NEC, as guidelines when manufacturing equipment. Amerimade can provide a quotation for any inspection reports you may require. Amerimade Technology guarantees our systems will pass a 3rd. party electrical inspection.


 Service and Support:

How about service and support after the sales? 

Yes, Amerimade warranties its whole line of products, we have a field support team which is available 24/7 by calling our toll free number: 1-800-938-3824 (1-800-WET-ETCH) or visit our dedicated service division at UptimeService.com; this support would depend on your specific contract with Amerimade Technology.

 

Will Amerimade do start-up and training of my new equipment? 

Yes, Amerimade technicians may be on site to assist the customer in making sure items are connected properly. After the install is completed (by customer) Amerimade support may do first run (start up) of the system and employee training. This support would depend on your specific contract with Amerimade Technology.

 

Would Amerimade install the equipment i.e. Wet Stations at our facility? 

Amerimade normally does not install new systems, this would be the reasonability of the customer or their contractors, however Amerimade technicians may be on site to assist in making sure items are connected properly. After the install is completed Amerimade support may do first run (start up) of the system and employee training, this support would depend on your specific contract with Amerimade Technology.

 

Does Amerimade have the capability to upgrade my existing system? 

Yes, we have field technicians and engineers specializing in these areas. Please visit our dedicated service division at UptimeService.com

 

Can Amerimade supply parts and / or service on other brand equipment? 

Amerimade stocks a variety of parts and components for use on other brands. i.e. UltraFab, BPS...


 Sales:

Would it be possible for our company to visit Amerimade? 

Yes, Amerimade welcomes visitors, we can provide a plant tour complete with working demo equipment.

 

Will Amerimade visit my facility? 

Upon request Amerimade sales / engineers would be happy to visit and review your current and future requirements.

 

Can I get a firm detailed quotation with layout drawings? 

Yes, once you have provided your request to our sales department, we will provide a detailed quote, lead time, terms and overview drawings of your request.

 

Can I get a quick budgetary quotation for a new wet bench? 

Yes, visit our 3 step online Create-A-Bench, its fast and easy, or you can call one of our sales engineers @ 1-800-938-3824 (1-800-WET-ETCH).

 

Does Amerimade offer discounts on multi-system orders? 

Yes, our customers would benefit from placing multiple orders at the same time, please call our sales dept. for more information. 1-800-938-3824

 

Can I use a credit card to make purchases? 

Yes, we accept most major credit cards, i.e. AMEX - Master Card  - Visa.

 

Do you have any pre-owned equipment available? 

Yes, visit our online SurplusWetStations.com, or you can call our sales department @ 1-800-938-3824 (1-800-WET-ETCH).


 Documentation:

What happens after my order is placed, is a timeline provided? 

Yes, Amerimade will provide a timeline, hold a review meeting with the customer and create detailed sign-off drawings.

 

Does Amerimade provide operation manuals? 

Yes, Amerimade will provide a complete operation (software) and maintenance manuals with detailed schematics of the equipment wiring, plumbing and facility requirements.

 

What type (format) of documents and drawings can I expect to receive? 

Amerimade creates drawings for most projects using Solidworks - AutoCAD Inventor (3D) and standard CAD drawings, other document formats, i.e. Acrobat PDF, Pictures in JPG, MSWord, MSProject. Amerimade will convert any documents to a standard readable format for our customers.

 

What happens if I need extra equipment documents for city government or the local fire department? 

Yes, Amerimade will provide additional product information and drawings if available.


About Amerimade:

How long has Amerimade been manufacturing equipment, i.e. wet process systems | plating systems | chemical dispense

Since 1992 (over 16 years), with hundreds of reliable systems in service.

 

D&B report, is Amerimade financial sound? 

Amerimade has been in business since 1992, with excellent record keeping and D&B report. Documentation can be provided.

 

How many engineers does Amerimade have? 

We have over 16 qualified engineers to design and assist customers from start to finish. 

 

Does Amerimade have individual departments to respond to my needs? 

Yes, we are well organized with many departments to respond to your needs, i.e. engineering, technical, automation, design group, parts / service, sales engineers and administrative. 

 

Is Amerimade's manufacturing facility automated? 

Yes, Amerimade has several automated CNC routers, 2 automated CNC milling machines, automated bender, automated prototype system and many other machines to assure our customers receive a precision robust system.

 

Welcome to Amerimade Technology Inc.

SUPERIOR PERFORMANCE

LOW COST OF OWNERSHIP

KNOWLEDGEABLE STAFF

TOP SERVICE & SUPPORT

DESIGNED FOR SAFETY

EASE OF USE OPERATOR CONTROLS


Our Products Includes:

Supported PV Applications: 

  • Polysilicon filament prep

  • Chunk / slab polysilicon reprocessing prep

  • Crushed / pelletized polysilicon metal mitigation

  • Saw damage etching

  • Wafer texturing

  • Wafer cleaning

  • Oxide etching stripping

  • Pattern develop

  • Silicon feature etch (acidic or caustic)

  • Resist strip

 

 

For the photovoltaic / solar industry, we provide a full range of products which serve the great breadth of current research & development and production requirements. This includes versatile manual wet stations for early development of break-through silicon, CIS-thin-film, Silicon/GaAs technologies and Nanotechnology, as well as wet benches fully automated large batch processing systems for mainstream production applications. Thus, customers have the ability to enter production with the same processing technology as they developed their products on.

Many of our innovative customer solutions for wet benches include unique fixtures required to handle substrates that are of uncommon size, shape, rigidity, weight, and/or material, or which must be compatible with physical changes that occur during the wet process. Substrates which we have designed unique solutions for include: elements of up to 3,000mm in length, lenses of 1,200 pounds in weight, crushed material of 1mm grain size and flexible metal panels of <0.007” thickness.

Amerimade also Manufactures wet processing for Medical Device Equipment for Polishing Stents, Catheters, Micro Parts.  key: medical device equipment, Medical Devices needing polishing for stent, drug coated stents and micro machining wet benches, stripping and etching, cleaning with ultrasonic. Visit our product page to review all our wafer process systems and accessories.

-- Amerimade Wet Benches -- Amerimade Wet Bench -- Amerimade Used Wet Benches

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